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Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska

Author:: Ruska, W. Scot (Walter Scot)
Published:: New York : McGraw-Hill, [1987]
Copyright Date:: ©1987
Physical Description:: xviii, 430 pages : illustrations ; 25 cm.

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Series:

McGraw-Hill series in electrical engineering

Subject(s):

Integrated circuits—Design and construction

ISBN:

0070542805 (text)
0070542813 (solutions manual)

Bibliography Note:

Includes bibliographies and index.

View MARC record | catkey: 1131515