Particles in Gases and Liquids 1 [electronic resource] : Detection, Characterization, and Control / edited by K. L. Mittal
- Author:
- Mittal, K. L.
- Additional Titles:
- Proceedings of a symposium held in conjunction with the 18th Annual Meeting of the Fine Particle Society held in Boston, Massachusetts, August 3-7, 1987
- Published:
- Boston, MA : Springer US, 1989.
- Physical Description:
- 312p : online resource
- Additional Creators:
- SpringerLink (Online service)
- Access Online:
- ezaccess.libraries.psu.edu
- Contents:
- Monitoring Contaminant Particles in Gases and Liquids: A Review -- Measuring and Identifying Particles in Ultrapure Water -- Non-Poisson Models of Particle Counting -- Liquid Particle Counter Comparison -- Particle Counting of Liquid Systems using a Scanning Electron Microscope -- Improved Methodology for Measurement of Particle Concentrations in Semiconductor Process Chemicals -- Calibration of the Photo-sedimentometer LUMOSED with a Powder of Known Particle Size Distribution -- Particle Contamination Control and Measurement in Ultra-pure VLSI Grade Inert Gases -- Design and Practical Considerations in Using Cascade Impactors to Collect Particle Samples from Process Gases for Identification -- In-situ Monitoring of Particulate Contamination in Integrated Circuit Process Equipment -- A Real-time Fallout Monitor for 5–250 Micrometer Particles -- Measurement and Control of Particle-Bearing Air Currents in a Vertical Laminar Flow Clean Room -- Particle Deposition Velocity Studies in Silicon Technology -- Influence of Particle Charge on the Collection Efficiency of Electrified Filter Mats -- Particle Retention and Downstream Cleanliness of Point-of-use Filters for Semiconductor Process Gases -- A Fluid Dynamic Study of a Microcontaminant Particles Removal Process -- Particle Removal from Semiconductor Wafers using Cleaning Solvents -- Particle Contributions of Three Types of Cleanroom Jumpsuits -- Particle Generation in Devices used in Clean Manufacturing -- About the Contributors.
- Subject(s):
- ISBN:
- 9781461307938
- Digital File Characteristics:
- text file PDF
- Note:
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
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