Verification of frequency scaling laws for capacitive rf discharges using two-dimensional simulations [electronic resource].

Published:: Arlington, Va. : National Science Foundation (U.S.), 1992.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description:: 35 pages : digital, PDF file
Additional Creators:: University of California, Berkeley, National Science Foundation (U.S.), and United States. Department of Energy. Office of Scientific and Technical Information

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Summary:

Weakly ionized processing plasmas are studied in two-dimensions using a bounded particle-in-cell (PIC) simulation code with a Monte Carlo Collision (MCC) package. The MCC package models the collisions between charged and neutral particles, which are needed to obtain a self-sustained plasma and the proper electron and ion energy loss mechanisms. A two-dimensional capacitive RF discharge is investigated in detail. Simple frequency scaling laws for predicting the behavior of some plasma parameters are derived and then compared with simulation results, finding good agreements. We find that as the drive frequency increases, the sheath width decreases, and the bulk plasma becomes more uniform, leading to a reduction of the ion angular spread at the target and an improvement of ion dose uniformity at the driven electrode.

Report Numbers:

E 1.99:ucb/erl-m--92/146
ucb/erl-m--92/146

Subject(s):

Other Subject(s):

Note:

Published through SciTech Connect.
12/15/1992.
"ucb/erl-m--92/146"
"DE94001306"
"AT0520210/AT0540420"
": Grant ECS-8910827"
"Contract FD-N00014-90-J-1198"
Lieberman, M.A.; Birdsall, C.K.; Rognlien, T.D.; DiPeso, G.; Vahedi, V.

Type of Report and Period Covered Note:

Topical; 12/01/1992 - 12/01/1992

Funding Information:

FG03-90ER54079
W-7405-ENG-48

View MARC record | catkey: 13826195