10th annual Symposium on Microlithography : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California / sponsored by Bacus International

Conference Author: Symposium on Microlithography (10th : 1990 : Sunnyvale, Calif)
Published: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1991]
Copyright Date: ©1991
Physical Description: v, 315 pages : illustrations ; 23 cm.
Additional Creators: Bacus International