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Optical/laser microlithography : 3-5 March 1993, San Jose, California / John D. Cuthbert, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

Published
Bellingham, Wash., USA : SPIE, [1993]
Copyright Date
©1993
Physical Description
2 volumes (x, 933 pages) : illustrations (some color) ; 28 cm.
Additional Creators
Cuthbert, John D. and Society of Photo-optical Instrumentation Engineers

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Series
Subject(s)
ISBN
0819411612 (pbk.)
Related Titles
Optical/laser microlithography VI.
Optical/laser microlithography 6.
Optical/laser microlithography six
Note
Spine title: Optical/laser microlithography VI.
Bibliography Note
Includes bibliographical references and author index.
View MARC record | catkey: 1404678