Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources [electronic resource].

Published: Albuquerque, N.M. : Sandia Corporation, 1996.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Additional Creators: Sandia Corporation and United States. Department of Energy. Office of Scientific and Technical Information

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Summary

Method and apparatus for producing extreme ultra violet (EUV) and soft x-ray radiation from an ultra-low debris plasma source are disclosed. Targets are produced by the free jet expansion of various gases through a temperature controlled nozzle to form molecular clusters. These target clusters are subsequently irradiated with commercially available lasers of moderate intensity (10.sup.11 -10.sup.12 watts/cm.sup.2) to produce a plasma radiating in the region of 0.5 to 100 nanometers. By appropriate adjustment of the experimental conditions the laser focus can be moved 10-30 mm from the nozzle thereby eliminating debris produced by plasma erosion of the nozzle.

Report Numbers

E 1.99:us 5577092
us 5577092

Other Subject(s)

Cluster Beam Targets Laser Plasma Extreme Ultraviolet Soft X-Ray Sources Method Apparatus Producing Extreme Ultra Violet Euv Soft X-Ray Radiation Ultra-Low Debris Plasma Source Disclosed Targets Produced Free Jet Expansion Various Gases Temperature Controlled Nozzle Form Molecular Clusters Target Clusters Subsequently Irradiated Commercially Available Lasers Moderate Intensity 10 11 10 12 Watts Cm Produce Plasma Radiating Region 100 Nanometers Appropriate Adjustment Experimental Conditions Laser Focus Moved 10-30 Nozzle Eliminating Debris Produced Plasma Erosion Nozzle Various Gases Temperature Controlled Free Jet Beam Target Laser Focus Laser Plasma Temperature Control X-Ray Source Plasma Source Extreme Ultraviolet Soft X-Ray Soft X-Ray Commercially Available X-Ray Radiation Ultra Violet Ray Radiation X-Ray Sources Plasma Extreme Available Laser

Note

Published through SciTech Connect.
01/01/1996.
"us 5577092"
Kublak, Glenn D.; Richardson, Martin C.

Funding Information

AC04-94AL85000

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