Gigabit chips [electronic resource] : A case history of a transfer of federal technology
- Upton, N.Y. : Brookhaven National Laboratory, 1987. and Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- Pages: 9 : digital, PDF file
- Additional Creators:
- Brookhaven National Laboratory and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- This report discusses the need for industry/government cooperation in developing new semiconductor technology. In order to increase memory density of chips from 1M bit, it is necessary to use a process other than optical lithography for production. The technique considered here is x-ray lithography. Industry is currently found to be unwilling or unable to finance research into this technology. If US industry is to remain competitive in the world semiconductor market, it is concluded that the government must cooperate and support work in this area. 16 refs. (JDH)
- Published through SciTech Connect., 01/01/1987., "bnl-39708", " conf-8706111-1", "DE87010368", 12. annual meeting and international symposium of the Technology Transfer Society, Washington, DC, USA, 22 Jun 1987., and Marcuse, W.
- Funding Information:
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