MICROSCALE METROLOGY USING STANDING WAVE PROBES [electronic resource].
- Published
- Washington, D.C. : United States. Dept. of Energy, 2008.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy. - Physical Description
- PDF-file: 6 pages; size: 0.9 Mbytes
- Additional Creators
- Lawrence Berkeley National Laboratory, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
Access Online
- Restrictions on Access
- Free-to-read Unrestricted online access
- Summary
- Miniaturization has been one of the driving forces in the development of new technologies leading to new products in a variety of industries. As a result, the integration of components over several orders of magnitude on the length scale poses enormous challenges for quality assurance and control. Therefore, new solutions are necessary to meet the growing need for more challenging metrology tasks and metrology requirements in nano- and micro-technology. However, with miniaturization, new challenges arise such as the increased influence of adhesion, electrostatic, Van der Waals and meniscus forces that affect the measurement process. Technical solutions to overcome these micro- and nano-metrology challenges will include the need for traceability, new calibration procedures and calibration artifacts. Over the past decade many new metrology tools have been proposed, however; for contact based measurements, adhesion between the measurement probe and the specimen still proves to be one of the more difficult challenges to overcome. To address this issue, a new class of tactile sensing probe referred to as standing wave sensor has been developed and was previously presented. Previous work introduced the principle of operation of the standing wave senor. This work presents new measurements showing applications of the standing wave probe as the sensing element in a microscale high aspect ratio profiling system.
- Report Numbers
- E 1.99:llnl-proc-406066
llnl-proc-406066 - Subject(s)
- Other Subject(s)
- Note
- Published through SciTech Connect.
08/04/2008.
"llnl-proc-406066"
Presented at: 23rd ASPE Annual Meeting and 12th ICPE, Portland, OR, United States, Oct 19 - Oct 24, 2008.
Smith, S T; Darnell, I; Seugling, R M; Florando, J N; Bauza, M B; Woody, S C. - Funding Information
- W-7405-ENG-48
View MARC record | catkey: 14104089