Controller strategy for a 6 DOF piezoelectric translation stage [electronic resource].

Published:: Washington, D.C. : United States. Dept. of Energy, 2006.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description:: PDF-file: 6 pages; size: 60 Kbytes
Additional Creators:: Lawrence Berkeley National Laboratory, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information

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Summary:

A controller for the third generation, 6 degree-of-freedom (DOF) piezoelectric translation stage shown in Figure 1 is presented. This was tested by monitoring all six coordinate motions using an orthogonal array of six, high-resolution capacitance gages. The full 6 DOF matrix transformations and controller block diagrams for this system have been measured and the system operated under closed loop control. Results of early experiments to determine the 21 open loop response functions as well as preliminary results showing the closed loop response for the 3 linear translations are presented in this abstract. The ultimate goal of this project is to incorporate this 6 DOF stage within a long range X-Y scanning system for nanometer pick-and-place capability over an area of 50 x 50 mm. The control strategy and early results from this system will be presented.

Report Numbers:

E 1.99:ucrl-proc-220093
ucrl-proc-220093

Subject(s):

Engineering

Other Subject(s):

Note:

Published through SciTech Connect.
03/22/2006.
"ucrl-proc-220093"
Presented at: EUSPEN 6th International Conference, Baden, Austria, May 28 - Jun 01, 2006.
Smith, S T; Trumper, D L; Yang, H; Hocken, R J; Buice, E S; Seugling, R M; Otten, D.

Funding Information:

W-7405-ENG-48

View MARC record | catkey: 14104167