A MEMS Based Hybrid Preconcentrator/Chemiresistor Chemical Sensor [electronic resource].
- Washington, D.C. : United States. Dept. of Energy, 2000. and Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 10 pages : digital, PDF file
- Additional Creators:
- Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- A hybrid of a microfabricated planar preconcentrator and a four element chemiresistor array chip has been fabricated and the performance as a chemical sensor system has been demonstrated. The close proximity of the chemiresistor sensor to the preconcentrator absorbent layer allows for fast transfer of the preconcentrated molecules during the heating and resorption step. The hybrid can be used in a conventional flow sampling system for detection of low concentrations of analyte molecules or in a pumpless/valveless mode with a grooved lid to confine the desorption plume from the preconcentrator during heating.
- Published through SciTech Connect., 06/12/2000., "sand2000-1471c", 198th Meeting of the Electrochemical Society, Phoenix, AZ (US), 10/22/2000--10/27/2000., and HUGHES,ROBERT C.; MANGINELL,ROLD P.; PATEL,SANJAY V.
- Funding Information:
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