Actions for Lubrication of polysilicon micromechanisms with self-assembled monolayers [electronic resource].

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Lubrication of polysilicon micromechanisms with self-assembled monolayers [electronic resource].

Published
Arlington, Va. : National Science Foundation (U.S.), 1998.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
7 pages : digital, PDF file
Additional Creators
Sandia National Laboratories, National Science Foundation (U.S.), and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
Here, the authors report on the lubricating effects of self-assembled monolayers (SAMs) on MEMS by measuring static and dynamic friction with two polysilicon surface- micromachined devices. The first test structure is used to study friction between laterally sliding surfaces and with the second, friction between vertical sidewalls can be investigated. Both devices are SAM-coated following the sacrificial oxide etch and the microstructures emerge released and dry from the final water rinse. The coefficient of static friction, μ{sub s} was found to decrease from 2.1 ± 0.8 for the SiO₂ coating to 0.11 ± 0.01 and 0.10 ± 0.01 for films derived from octadecyltrichloro-silane (OTS) and 1H,1H,2H,2H-perfluorodecyl-trichlorosilane (FDTS). Both OTS and FDTS SAM-coated structures exhibit dynamic coefficients of friction, μ{sub d} of 0.08 ± 0.01. These values were found to be independent of the apparent contact area, and remain unchanged after 1 million impacts at 5.6 {micro}N (17 kPa), indicating that these SAMs continue to act as boundary lubricants despite repeated impacts. Measurements during sliding friction from the sidewall friction testing structure give comparable initial μ{sub d} values of 0.02 at a contact pressure of 84 MPa. After 15 million wear cycles, μ{sub d} was found to rise to 0.27. Wear of the contacting surfaces was examined by SEM. Standard deviations in the μ data for SAM treatments indicate uniform coating coverage.
Report Numbers
E 1.99:sand--98-0848c
E 1.99: conf-980638--
conf-980638--
sand--98-0848c
Subject(s)
Other Subject(s)
Note
Published through SciTech Connect.
06/01/1998.
"sand--98-0848c"
" conf-980638--"
"DE98004530"
"DP0102031"
1998 solid state sensor and actuator workshop, Hilton Head, SC (United States), 1 Jun 1998.
Foster, J.D.; Howe, R.T.; Dugger, M.T.; Srinivasan, U.; Maboudian, R.; Senft, D.C.; Habib, U.
Funding Information
AC04-94AL85000
View MARC record | catkey: 14108375