Actions for MEMS design rule checking [electronic resource] : a batch approach for remote operation

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MEMS design rule checking [electronic resource] : a batch approach for remote operation

Published
Washington, D.C. : United States. Dept. of Energy, 1998.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
10 pages : digital, PDF file
Additional Creators
Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
This paper describes a design rule checking (DRC) tool developed as an aid for designing microelectromechanical structures (MEMS) using AutoCAD running on a Windows NT workstation. The application suite, MEMSdrc, consists of: a graphical user interface integrated into AutoCAD to invoke DRC, translation and interface software to communicate with a commercial IC layout design checking software package, and routines to interactively display and review the results. The user interface provides the capability to select a checking window area and specific DRC rules to be applied to the design. The MEMS structures, defined as 2D AutoCAD geometry are translated first into DXF format, then to GDSII format. A remote process transfers the files to a Unix workstation where Mentor Graphics ICverify is invoked to perform the layout design rule checks. Upon completion, the results are translated into DXF geometry and returned back to the Windows NT workstation to be overlaid onto the original design. A set of icons are provided for the user to interactively review the results inside of AutoCAD using a first/next/previous technique.
Report Numbers
E 1.99:sand--d-98-0205c
E 1.99: conf-980308--
conf-980308--
sand--d-98-0205c
Subject(s)
Other Subject(s)
Note
Published through SciTech Connect.
01/01/1998.
"sand--d-98-0205c"
" conf-980308--"
"DE98002727"
"YN0100000"
5. annual symposium on smart structures and materials, San Diego, CA (United States), 1-3 Mar 1998.
Yarberry, V.R.
Funding Information
AC04-94AL85000
View MARC record | catkey: 14110377