Actions for Frequency doubling of copper lasers using temperature-tuned ADP [electronic resource].

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Frequency doubling of copper lasers using temperature-tuned ADP [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 1994.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
23 pages : digital, PDF file
Additional Creators
Lawrence Livermore National Laboratory, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
The ability to generate high average power uv at 255 nm by frequency doubling the green line (510.6 nm) of copper lasers would greatly extend the utility of copper lasers. Material processing and microlithography are two areas of interest. The frequency-doubled copper laser could replace the KrF excimer laser, which has a similar wavelength (248 nm), in some applications. The frequency-doubled copper laser has a narrow linewidth and excellent beam quality at a competitive cost. Other attractive features are high reliability, low operating costs, and the absence of toxic gases. This paper will report recent progress in high-efficiency, high-average-power harmonic generation of the copper laser green line using noncritical phase matching in ADP. Frequency doubling of the yellow line (578.2 nm) and sum-frequency mixing of the two lines are also of interest. These processes, however, cannot be phase-matched in ADP and, therefore, will not be discussed here. The results reported and the issues identified here would be important in these other processes and also in many other frequency conversion schemes in the uv such as 4ω conversion of Nd{sup 3+}:YAG lasers.
Report Numbers
E 1.99:ucrl-id--117008
ucrl-id--117008
Subject(s)
Other Subject(s)
Note
Published through SciTech Connect.
03/01/1994.
"ucrl-id--117008"
"DE94011542"
Molander, W.A.
Type of Report and Period Covered Note
Topical; 03/01/1994 - 03/01/1994
Funding Information
W-7405-ENG-48
View MARC record | catkey: 14110647