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Complete Method for E{sub bd} Correction by Series Resistance Characterization [electronic resource].

Published:
Washington, D.C. : United States. Dept. of Energy, 1998.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description:
6 pages : digital, PDF file
Additional Creators:
Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary:
We have developed a semi-automated method for determining the series resistance profiles of dot capacitors and for obtaining corrected oxide fields at breakdown. This method is based upon a least-squares-fit of IV data obtained from a voltage-ramp test to the Fowler-Nordheim leakage model. The profiles provide insight into the general characteristics of series resistance. Certain features of the profiles can be associated with charge trapping and the onset of oxide breakdown.
Report Numbers:
E 1.99:sand98-1512c
sand98-1512c
Subject(s):
Other Subject(s):
Note:
Published through SciTech Connect.
10/09/1998.
"sand98-1512c"
"DE00003935"
1998 International Integrated Reliability Workshop, Lake Tahoe, CA, 10/12-15/1998.
Swanson, Scot E.; Monroe, David K.
Funding Information:
AC04-94AL85000
View MARC record | catkey: 14112069