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Acoustic, fiber optic, and silicon microelectronic microsensors research and development activities at Sandia National Laboratories [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 1993.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
7 pages : digital, PDF file
Additional Creators
Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
Sandia National Laboratories, an 8500+ person, multiprogram research and development facility operated for the US Department of Energy, has over 400 research, development and applications scientists and engineers working on sensor technologies. Sandia`s 20 person Microsensors Research and Development Department has invented, developed and fielded sensor systems based on acoustic, fiber optic, and silicon microelectronic technologies. These sensors have been used for diverse applications inducting the monitoring of cleaning chemical concentrations in industrial process effluent streams, detection of explosive gas concentrations in aging industrial equipment, real-time measurements of fluid viscosity in equipment lubricants, and monitoring of contaminant concentration levels in ultrapure process gases. Representative sensor technologies available for technology transfer will be described including bulk acoustic wave resonators, surface acoustic wave devices, fiber optic micromirror sensors, and silicon microelectronic sensors.
Report Numbers
E 1.99:sand--93-1564c
E 1.99: conf-9310146--1
conf-9310146--1
sand--93-1564c
Subject(s)
Other Subject(s)
Note
Published through SciTech Connect.
08/01/1993.
"sand--93-1564c"
" conf-9310146--1"
"DE93019075"
Sensors Expo conference,Philadelphia, PA (United States),26-28 Oct 1993.
Wiczer, J.J.
Funding Information
AC04-76DP00789
View MARC record | catkey: 14112757