Actions for Time-of-flight detector for heavy ion backscattering spectrometry [electronic resource].

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Time-of-flight detector for heavy ion backscattering spectrometry [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 1994.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
12 pages : digital, PDF file
Additional Creators
Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
This report describes the results of a two-year laboratory directed research and development project to explore advanced concepts in Heavy Ion Backscattering Spectrometry (HIBS), undertaken with the goal of extending the sensitivity of this relatively new technique to levels unattainable by any other existing trace element surface analysis. Improvements in sensitivity are required for the application of HIBS to contamination control in the microelectronics industry. Tools with sensitivity approaching 10⁸ atoms/cm² are expected to be essential for enabling advanced IC production by the year 2000. During the project the authors developed a new analysis chamber with channeling goniometer and a prototype time-of-flight detector with a demonstrated sensitivity of ∼ 5 × 10⁸ atoms/cm² for Au on Si and ∼ 5 × 10¹° for Fe, and sufficient mass resolution to separate contributions from Fe and Cu.
Report Numbers
E 1.99:sand--94-0391
sand--94-0391
Subject(s)
Other Subject(s)
Note
Published through SciTech Connect.
04/01/1994.
"sand--94-0391"
"DE94015600"
"GB0103012"
Knapp, J.A.; Banks, J.C.; Doyle, B.L.
Type of Report and Period Covered Note
Topical; 04/01/1994 - 04/01/1994
Funding Information
AC04-94AL85000
View MARC record | catkey: 14114025