Actions for Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas
Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas / Wayne Bailey [and others], chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International [and others], published by SPIE--the International Society for Optical Engineering
- Published
- Bellingham, Wash., USA : SPIE, [1995]
- Copyright Date
- ©1995
- Physical Description
- v, 154 pages : illustrations ; 28 cm.
View MARC record | catkey: 1423563