The decomposition of methyltrichlorosilane [electronic resource] : Studies in a high-temperature flow reactor
- Washington, D.C. : United States. Dept. of Energy, 1994.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 15 pages : digital, PDF file
- Additional Creators:
- Sandia National Laboratories
United States. Department of Energy
United States. Department of Energy. Office of Scientific and Technical Information
- Experimental measurements of the decomposition of methyltrichlorosilane (MTS), a common silicon carbide precursor, in a high-temperature flow reactor are presented. The results indicate that methane and hydrogen chloride are major products of the decomposition. No chlorinated silane products were observed. Hydrogen carrier gas was found to increase the rate of MTS decomposition. The observations suggest a radical-chain mechanism for the decomposition. The implications for silicon carbide chemical vapor deposition are discussed.
- Published through SciTech Connect.
Materials Research Society (MRS) meeting on gas-phase and surface chemistry in electronics materials processing,Boston, MA (United States),Dec 1993.
Allendorf, M.D.; Melius, C.F.; Osterheld, T.H.
- Funding Information:
View MARC record | catkey: 14395088