Mechanisms for the deposition of thin metallic films by laser driven gas phase reactions [electronic resource].
- Los Alamos, N.M. : Los Alamos National Laboratory, 1986.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- Pages: 6 : digital, PDF file
- Additional Creators:
- Los Alamos National Laboratory and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- Gas phase processing makes laser deposition over large areas possible but homogeneous nucleation of large atomic clusters must be avoided if films are to be produced. Clusters can be highly variable in size from a few atoms to significant fractions of a micrometer. If conditions do not allow for complete quenching of the clusters produced in the gas phase, these clusters can arrive at the substrate with sufficient energy to self sinter into homogeneous films which are substantially different from metallic films grown by thermal techniques. Using transmission electron microscopy (TEM), we have characterized the microstructure of thin metallic films deposited by laser breakdown chemical vapor deposition and identified a range of deposition conditions which can lead from powders to homogeneous polycrystalline films and mixed phase materials. Gas phase nucleation is dependent on reactant partial pressures and the gas phase quench rate which can be varied in part by adjusting the H/sub 2/ content of the source gas. Manipulation of these parameters can vary powder size from about one micrometer to less than 2 nanometers. Variation of the quench rate during the deposition of polycrystalline films varies the grain size in the films. Heating the substrate drastically changes the conditions under which the film is formed and as a consequence, can radically alter the microstructure of the film itself. 6 refs., 2 figs.
- Report Numbers:
- E 1.99:la-ur-86-3778
E 1.99: conf-861207-13
- Other Subject(s):
- Published through SciTech Connect.
Materials Research Society fall meeting, Boston, MA, USA, 1 Dec 1986.
Carroll, D.W.; Joyce, E.L.; Jervis, T.R.; Menon, S.K.
- Funding Information:
View MARC record | catkey: 14396957