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Laser produced plasma soft x-ray generation [electronic resource].

Published:
Washington, D.C. : United States. Dept. of Energy, 1991.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description:
Pages: (6 pages) : digital, PDF file
Additional Creators:
Lawrence Livermore National Laboratory, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary:
The efficiency of soft x-ray production from laser-irradiated plasmas is simulated for two different spectral regions. These two regions, 14Å {plus minus} 15% and 130Å {plus minus} 1%, were chosen for proximity mask or point-projection technological applications. Relatively large conversion efficiencies were obtained from irradiation of a stainless steel target using the conditions suggested by recent Hampshire Instruments' experiments for proximity masking. Pulse-width and laser frequency parameter studies were performed for point-projection applications which suggest that the conversion applications which suggest that the conversion efficiency is sensitive to pulse-width but not to laser frequency. One of the critical components of any x-ray lithographic scheme is of course the x-ray laser source. There are two primary contenders for a reliable, efficient source currently: synchrotron radiation and spectral emission from laser produced plasma. The dominant issue for laser-plasma emission is the conversion efficiency -- output in the intended operating spectral region relative the required incident laser energy. Simulations are described in the following for both high and low energy spectral regions which have been suggested by either the proximity masking or point-projection technology.
Report Numbers:
E 1.99:ucrl-jc-107382
E 1.99: conf-9104203--5
conf-9104203--5
ucrl-jc-107382
Subject(s):
Other Subject(s):
Note:
Published through SciTech Connect.
05/20/1991.
"ucrl-jc-107382"
" conf-9104203--5"
"DE91016925"
Soft-x-ray projection lithography topical meeting, Monterey, CA (United States), 10-12 Apr 1991.
Rosen, M.D.; Cerjan, C.
Funding Information:
W-7405-ENG-48
View MARC record | catkey: 14404000