Iterative procedure for in-situ EUV optical testing with an incoherent source [electronic resource].
- Berkeley, Calif. : Lawrence Berkeley National Laboratory, 2009. and Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 9 : digital, PDF file
- Additional Creators:
- Lawrence Berkeley National Laboratory and United States. Department of Energy. Office of Scientific and Technical Information
- We propose an iterative method for in-situ optical testing under partially coherent illumination that relies on the rapid computation of aerial images. In this method a known pattern is imaged with the test optic at several planes through focus. A model is created that iterates through possible aberration maps until the through-focus series of aerial images matches the experimental result. The computation time of calculating the through-focus series is significantly reduced by a-SOCS, an adapted form of the Sum Of Coherent Systems (SOCS) decomposition. In this method, the Hopkins formulation is described by an operator S which maps the space of pupil aberrations to the space of aerial images. This operator is well approximated by a truncated sum of its spectral components.
- Published through SciTech Connect., 12/01/2009., "lbnl-3140e", JVST B 7636 FT, Naulleau, Patrick; Miyawaka, Ryan; Zakhor, Avideh., and Materials Sciences Division
- Funding Information:
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