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TEM studies of laterally overgrown GaN layers grown on non-polarsubstrates [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 2006.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Additional Creators
United States. Department of Energy and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
Transmission electron microscopy (TEM) was used to study pendeo-epitaxial GaN layers grown on polar and non-polar 4H SiC substrates. The structural quality of the overgrown layers was evaluated using a number of TEM methods. Growth of pendeo-epitaxial layers on polar substrates leads to better structural quality of the overgrown areas, however edge-on dislocations are found at the meeting fronts of two wings. Some misorientation between the 'seed' area and wing area was detected by Convergent Beam Electron Diffraction. Growth of pendeo-epitaxial layers on non-polar substrates is more difficult. Two wings on the opposite site of the seed area grow in two different polar directions with different growth rates. Most dislocations in a wing grown with Ga polarity are 10 times wider than wings grown with N-polarity making coalescence of these layers difficult. Most dislocations in a wing grown with Ga polarity bend in a direction parallel to the substrate, but some of them also propagate to the sample surface. Stacking faults formed on the c-plane and prismatic plane occasionally were found. Some misorientation between the wings and seed was detected using Large Angle Convergent Beam Diffraction.
Report Numbers
E 1.99:lbnl--60794
lbnl--60794
Other Subject(s)
Note
Published through SciTech Connect.
01/05/2006.
"lbnl--60794"
": 400403109"
Photonic West SPIE-The International Society forOptical Engineering, San Jose, CA, 1/22-1-16/06.
Morkoc, H.; Liliental-Weber, Z.; Ni, X.
Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
AFOSR ISSA 06NE001
Funding Information
DE-AC02-05CH11231
M70022
View MARC record | catkey: 14446349