Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films [electronic resource].
- Washington, D.C. : United States. Dept. of Energy, 2003.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 19 pages : digital, PDF file
- Additional Creators:
- Stanford Linear Accelerator Center, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- Supercritical carbon dioxide (SCCO2) extraction of a CO₂-soluble poly(propylene glycol) (PPG) porogen from poly(methylsilsesquioxane) (PMSSQ) cured to temperatures adequate to initiate matrix condensation, but still below the decomposition temperature of the porogen is demonstrated to produce nanoporous, ultralow dielectric constant thin films. Both closed and open cell porous structures were prepared simply by varying the porogen load in the organic/inorganic hybrid films. The porogen loads investigated in the present work ranged from 25-55 wt.%. Structural characterization of the samples conducted using transmission electron microscope (TEM), small angle X-ray scattering (SAXS) and Fourier transform infrared spectroscopy (FTIR) confirms the successful extraction of the porogen from the PMSSQ matrix at relatively low temperatures (≤ 200 C). The standard thermal decomposition process is performed at much higher temperatures (typically in the range of 400 C-450 C). The values of dielectric constants and refractive indices measured are in good agreement with the structural properties of these samples.
- Report Numbers:
- E 1.99:slac-pub-9990
- Published through SciTech Connect.
Toney, Michael F.
- Type of Report and Period Covered Note:
- Funding Information:
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