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Profiling and light scattering studies of Si surfaces [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 1994.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
3 pages : digital, PDF file
Additional Creators
Brookhaven National Laboratory, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
There is great interest in the semiconductor industry in developing light-scattering techniques for detecting ``killer particles`` on Si wafer surfaces. The surface power spectral density (PSD) is important since it determines the intensity and angular dependence of the background scattering; understanding it will lead to a deeper understanding of finishing processes. Scattering measurements showed that Si wafer surfaces have the radiation-wavelength and angular dependences expected for weak topographic scattering. The data and independent profile measurements were used to deduce consistent values of the surface PSDs over the wavelength range 50 nm to 1 mm. The profile PSDs were found to consist of a sum of inverse power-law components, i.e., the surfaces are fractal-like. There is an analogy between the results and spontaneous thermodynamic roughening of solid surfaces: Below the critical roughening temperature, the surface topography is determined by the underlying crystal structure, while above it, the surface ``melts`` and the roughness is determined by capillary-wave excitations of the surface. Capillary waves have the well-known 1/fₓ profile power spectrum.
Report Numbers
E 1.99:bnl--60904
E 1.99: conf-950246--1
conf-950246--1
bnl--60904
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Note
Published through SciTech Connect.
10/01/1994.
"bnl--60904"
" conf-950246--1"
"DE95002931"
""
Microphysics of surfaces: nanoscale processing meeting,Santa Fe, NM (United States),9-11 Feb 1995.
Stover, J.C.; Takacs, P.Z.; Church, E.L.
Funding Information
AC02-76CH00016
View MARC record | catkey: 14452367