Molecular beam mass spectrometry studies of the chemical vapor deposition of diamond [electronic resource].
- Washington, D.C. : United States. Dept. of Energy, 1993. and Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 30 pages : digital, PDF file
- Additional Creators:
- Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- We have developed a novel molecular beam mass spectrometry technique that can quantitatively analyze the gas-phase composition in a CVD reactor. The technique simultaneously monitors a wide variety of radical and stable species, and their concentrations can be determined with sensitivities approaching 1 ppM. Measurements performed in a diamond deposition system have given us keen insights into the important phenomena that affect the growth environment. This paper first discusses the primary gas sampling design issues. In the second part, the details of the experimental results and their implications will be described.
- Published through SciTech Connect., 12/01/1993., "sand--93-2678c", " conf-9311142--1", "DE94003802", "GB0103012", 15. dry processing symposium,Tokyo (Japan),1-2 Nov 1993., and Coltrin, M.E.; Hsu, Wen L.; Dandy, D.S.; McMaster, M.C.
- Funding Information:
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