Surface structure of tetrahedral-coordinated amorphous diamond-like carbon films grown by pulsed laser deposition [electronic resource].
- Arlington, Va. : National Science Foundation (U.S.), 1994. and Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 7 pages : digital, PDF file
- Additional Creators:
- Sandia National Laboratories, National Science Foundation (U.S.), and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- The structure and composition of tetrahedral-coordinated amorphous diamond-like carbon films (a-tC) grown by pulsed laser deposition (PLD) of graphite has been studied with atomic force microscopy (AFM). The nanometer-scale surface structure has been studied as a function of growth parameters (e.g., laser energy density and film thickness) using contact-mode and tapping-mode AFM. Although the surfaces were found to be generally smooth, they exhibited reproducible structural features on several size scales which correlate with the variation of laser energy and th excited ion etching.
- Published through SciTech Connect., 12/31/1994., "sand--94-2003c", " conf-941144--166", "DE95014854", ": DMR93-13047", "DMR91-20668", Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 28 Nov - 9 Dec 1994., and Sullivan, J.P.; Mercer, T.W.; Siegal, M.P.; Friedmann, T.A.; Martinez-Miranda, L.J.; DiNardo, N.J.; Fang, F.
- Funding Information:
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