Reorientation of misfit dislocations during annealing in InGaAs/GaAs(001) interfaces [electronic resource].
- Published:
- Washington, D.C. : United States. Dept. of Energy, 1993.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy. - Physical Description:
- 6 pages : digital, PDF file
- Additional Creators:
- Lawrence Berkeley National Laboratory
United States. Department of Energy
United States. Department of Energy. Office of Scientific and Technical Information - Access Online:
- www.osti.gov
- Summary:
- Transmission electron microscopy is applied to investigate the effect of postannealing on misfit dislocations in an In{sup 0.2}Ga{sup 0.8}As/GaAs(001) heterostructure. An orthogonal array of 60° dislocations along [110] and [110] directions was observed in the interfaces of the samples grown by MBE at 520C. When the as-grown samples were annealed at temperatures ranging from 600 to 800C, the 60° dislocations were gradually reoriented by dislocation reactions occurring at the 90° intersections followed by nonconservative motion driven by dislocation line tension and the residual elastic misfit strain. The final result of this process was a dislocation array lying along [100] and · [010] directions. The reoriented u =<100> dislocation has a Burgers vector b = a/2 <101>, which is the same as that of 60° dislocation, but the edge component of its Burgers vector in the (001) interfacial plane is larger than that of 60° dislocation by a factor of √2, resulting in a greater contribution to elastic strain relaxation. This nonconservative reorientation of 60° dislocations to form the u=<100> dislocations represents a new strain relaxation mechanism in diamond or zinc blende semiconductor heterostructures.
- Subject(s):
- Note:
- Published through SciTech Connect.
04/01/1993.
"lbl--34070"
" conf-930405--19"
"DE93015046"
Spring meeting of the Materials Research Society,San Francisco, CA (United States),12-16 Apr 1993.
Tsao, J.Y.; Chen, Y.; Washburn, J.; Klem, J.F.; Liliental-Weber, Z. - Funding Information:
- AC03-76SF00098
AC04-76DP00789
View MARC record | catkey: 14454696