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Ion beam milling of silicon carbide optical components [electronic resource].

Published:
Washington, D.C. : United States. Dept. of Defense, 1993.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description:
12 pages : digital, PDF file
Additional Creators:
Oak Ridge National Laboratory, United States. Department of Defense, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary:
Silicon carbide (SiC) is emerging as an important ceramic material for optical applications requiring stiff, lightweight structures with good thermal conductivity. This report discusses the application of ion milling in the fabrication of SiC optical components. Ion beam milling combined with either ductile grinding or polishing provides an excellent approach to deterministic fabrication of SiC optical components. Results of recent roughness evolution studies for SiC samples prepared by several pre-ion milling fabrication processes suggest that ductile grinding and some polishing processes can be used to produce low-subsurface-damage components suitable for ion milling. Results are also presented of experiments in which these processes have been used in conjunction with ion milling to figure SiC optical components. Typical improvements with optical figures after ion milling have convergences on the order of 2 or 3. Overall, these experiments indicate that ion milling combined with other fabrication processes represents a viable, highly deterministic approach to producing high-precision SiC optical components.
Report Numbers:
E 1.99:conf-930722--50
conf-930722--50
Subject(s):
Other Subject(s):
Note:
Published through SciTech Connect.
11/01/1993.
"conf-930722--50"
"DE94002439"
": Agreement 1855-1662-A1"
Annual meeting of the Society of Photo-Optical Instrumentation Engineers (SPIE),San Diego, CA (United States),11-16 Jul 1993.
Jackson, J.R.; Egert, C.M.; Carnal, C.L.; Hylton, K.W.
Funding Information:
AC05-84OR21400
View MARC record | catkey: 14457351