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Software for x-ray optics research instrumentation. Final report, 1991 [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 1992.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
4 pages : digital, PDF file
Additional Creators
Lawrence Livermore National Laboratory, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
The statement of work for this contract between The Regents of the University of California and Brigham Young University called for the implementation of computer controlled substrate motion in an existing DC magnetron sputtering system. This task entailed the design and fabrication of a vacuum compatible motor drive and substrate holder, the system had to be capable of closed loop microcomputer control which required the development of a suitable computer interface and control software. Concurrent with this task, the existing magnetron sputtering system was to be upgraded to permit ion assisted deposition. This required modification of the existing sputtering hardware to permit independent control of voltages applied to the substrate and other additional electrode assemblies. In addition to design, fabrication and installation of the system modifications a systematic study of Mo-Si multilayer coatings grown using ion assisted deposition was undertaken. These studies served, in part, as training of LLNL personnel in the ion assisted deposition technique.
Report Numbers
E 1.99:ucrl-cr--112526
ucrl-cr--112526
Subject(s)
Other Subject(s)
Note
Published through SciTech Connect.
03/01/1992.
"ucrl-cr--112526"
"DE93019914"
Knight, L.V.
Type of Report and Period Covered Note
Final; 03/01/1992 - 03/01/1992
Funding Information
W-7405-ENG-48
View MARC record | catkey: 14457755