Fundamental studies of defect generation in amorphous silicon alloys grown by remote plasma-enhanced chemical-vapor deposition (Remote PECVD). Annual subcontract report, 1 September 1990--31 August 1991 [electronic resource].
- Published
- Washington, D.C. : United States. Dept. of Energy, 1993.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy. - Physical Description
- 58 pages : digital, PDF file
- Additional Creators
- United States. Department of Energy and United States. Department of Energy. Office of Scientific and Technical Information
Access Online
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- Free-to-read Unrestricted online access
- Summary
- We demonstrated that the remote PECVD process can be used to deposit heavily doped n-type and p-type a-Si:H thin films. We optimized conditions for depositing undoped, near-intrinsic and heavily doped thin films of μc(microcrystalline)-Si by remote PECVD. We extended the remote PECVD process to the deposition of undoped and doped a-Si,C:H and μc-Si,C alloy films. We analyzed transport data for the dark conductivity in undoped and doped a-Si:H, a-Si,C:H, μc-Si and μc-Si,C films. We studied the properties of doped a-Si:H and μc-Si in MOS capacitors using ∼10 Ω-cm p-type crystalline substrates and thermally grown Si0₂ dielectric layers. We collaborated with a group at RWTH in Aachen, Germany, and studied the contributions of process induced defect states to the recombination of photogenerated electron pairs. We applied a tight-binding model to Si-Bethe lattice structures to investigate the effects of bond angle, and dihedral angle disorder. We used ab initio and empirical calculations to study non-random bonding arrangements in a-Si,O:H and doped a-Si:H films.
- Report Numbers
- E 1.99:nrel/tp--451-4852
nrel/tp--451-4852 - Subject(s)
- Other Subject(s)
- Note
- Published through SciTech Connect.
01/01/1993.
"nrel/tp--451-4852"
"DE92010560"
Lee, D.; Wang, C.; Davidson, B.; Williams, M.; Lucovsky, G.; Whitten, J.; Nemanich, R.J.; Jing, Z.; Bernholc, J.; Bjorkman, C.
National Renewable Energy Lab., Golden, CO (United States)
North Carolina State Univ., Raleigh, NC (United States) - Type of Report and Period Covered Note
- Topical; 01/01/1993 - 01/01/1993
- Funding Information
- AC02-83CH10093
View MARC record | catkey: 14458603