Structural and interfacial characteristics of thin (<10 nm) SiO sub 2 films grown by electron cyclotron resonance plasma oxidation on (100) Si substrates [electronic resource].
- Washington, D.C. : United States. Dept. of Energy, 1991.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- Pages: (12 pages) : digital, PDF file
- Additional Creators:
- Lawrence Berkeley National Laboratory
United States. Department of Energy
United States. Department of Defense
National Science Foundation (U.S.)
United States. Department of Energy. Office of Scientific and Technical Information
- The feasibility of fabricating ultra-thin SiO₂ films on the order of a few nanometer thickness has been demonstrated. SiO₂ thin films of approximately 7 nm thickness have been produced by ion flux-controlled Electron Cyclotron Resonance plasma oxidation at low temperature on (100) Si substrates, in reproducible fashion. Electrical measurements of these films indicate that they have characteristics comparable to those of thermally grown oxides. The thickness of the films was determined by ellipsometry, and further confirmed by cross-sectional High-Resolution Transmission Electron Microscopy. Comparison between the ECR and the thermal oxide films shows that the ECR films are uniform and continuous over at least a few microns in lateral direction, similar to the thermal oxide films grown at comparable thickness. In addition, HRTEM images reveal a thin (1--1.5 nm) crystalline interfacial layer between the ECR film and the (100) substrate. Thinner oxide films of approximately 5 nm thickness have also been attempted, but so far have resulted in nonuniform coverage. Reproducibility at this thickness is difficult to achieve.
- Published through SciTech Connect.
Spring meeting of the Materials Research Society (MRS), Anaheim, CA (United States), 29 Apr - 3 May 1991.
Lieberman, M.A.; Carl, D.A.; Hess, D.W.; Nguyen, T.D.; Gronsky, R.
- Funding Information:
View MARC record | catkey: 14459131