Reactive sputtering of molybdenum-oxide gradient-index filters [electronic resource].
- Washington, D.C : United States. Dept. of Energy. Office of the Assistant Secretary for Defense Programs, 1990. and Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- Pages: (15 pages) : digital, PDF file
- Additional Creators:
- Lawrence Livermore National Laboratory, United States. Department of Energy. Office of the Assistant Secretary for Defense Programs, and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- Molybdenum-oxide gradient-index films are produced by reactive sputter deposition. A molybdenum metal target is sputtered continuously with an argon-oxygen gas mixture. For each target power used, a reproducible oxide composition and corresponding refractive index result. Repetitive variation of applied target power is used to produce a structure composed of discrete layers of preselect stoichiometry. The systematic control of a single process parameter, target power, simplifies the fabrication of molybdenum-oxide rugate filters. 7 refs., 6 figs.
- Published through SciTech Connect., 08/01/1990., "ucrl-jc-103668", " conf-901035--4", "DE91000939", 37. national American Vacuum Society symposium, Toronto (Canada), 8-12 Oct 1990., and Perry, P.L.; Jankowski, A.F.; Schrawyer, L.R.
- Funding Information:
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