Auger and depth profile analysis of synthetic crystals for dispersion of soft x-rays [electronic resource].

Published:: Livermore, Calif : Lawrence Livermore National Laboratory, 1983.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description:: Pages: 25 : digital, PDF file
Additional Creators:: Lawrence Livermore National Laboratory and United States. Department of Energy. Office of Scientific and Technical Information

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Summary:

Numerous samples have been fabricated and analyzed as part of a program to produce soft x-ray dispersion elements for various laboratory applications. The majority of this work has centered around the carbon/tungsten system, although several other low-Z/high-Z pairs have been investigated. This report describes the development of certain vacuum-deposition techniques for fabricating these dispersion elements, based upon results obtained from x-ray reflectivity measurements and Auger depth-profile analysis. The composition of the films is chiefly alternating layers of tungsten carbide and carbon. Excess carbon is introduced during the deposition of the tungsten to ensure that the carbide layer is fully stoichiometric. Layer thickness ranged from approx. 5 to 30 A for the carbide and from approx. 15 to 80 A for the carbon. The reflectivity measurements were made using Fe and Al K/sub ..cap alpha../ at grazing incidence. The emphasis in these studies is on the application of surface-analysis results in suggesting modifications to the fabrication process and in evaluating the results such modifications have on the layer stoichiometry, continuity, and periodicity of the dispersion elements so produced.

Report Numbers:

E 1.99:la-ur-83-1965
E 1.99: conf-830690-1
conf-830690-1
la-ur-83-1965

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Note:

Published through SciTech Connect.
01/01/1983.
"la-ur-83-1965"
" conf-830690-1"
"DE83015257"
Symposium on applied surface analysis, Dayton, OH, USA, 9 Jun 1983.
Brown, D.R.; Springer, R.W.; Arendt, P.N.; Rachocki, K.D.

Funding Information:

W-7405-ENG-36

View MARC record | catkey: 14461122