Actions for Preparation and characterization of hydrogenated amorphous silicon thin films and thin film solar cells produced by ion plating techniques. Second quarterly progress report, 1 April 1979-30 Jun 1979 [electronic resource].

Email RIS file
Bookmark
Report an Issue

Preparation and characterization of hydrogenated amorphous silicon thin films and thin film solar cells produced by ion plating techniques. Second quarterly progress report, 1 April 1979-30 Jun 1979 [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 1979.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
Pages: 23 : digital, PDF file
Additional Creators
Duke University. Department of Mechanical Engineering and Materials Science, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
Access Online

Availability

I Want It
I Want It

Finding items...

Restrictions on Access
Free-to-read Unrestricted online access
Summary
Using quartz substrates, hydrogenated a-Si thin films have now been produced both by flow discharge decomposition of silane and by the controlled ion plating of high purity silicon through flow discharges composed of silane, hydrogen, and argon using a modified Takagi apparatus. Thus far, thin films produced by both glow discharge decomposition of silane with and without magnetic confinement and by ion plating have been characterized and compared using x-ray diffractometry, infrared spectrometry, optical absorption spectroscopy and by their temperature dependence of resistivity. Based on these results, the ion plating technique of producing a-Si thin films looks extremely encouraging. Films have been produced at approximately ten times the decomposition rate obtained using glow discharge decomposition of silane, even with magnetic field containment. In addition the resulting thin film properties measured to date compare favorably with those obtained from glow discharge produced films.
Report Numbers
E 1.99:doe/et/23041-2
doe/et/23041-2
Subject(s)
Other Subject(s)
Note
Published through SciTech Connect.
09/01/1979.
"doe/et/23041-2"
Dimmey, L; Jones, P L; Cocks, F H.
Funding Information
AC03-79ET23041
View MARC record | catkey: 14461756