Actions for Smart materials fabrication and materials for micro-electro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A.
Smart materials fabrication and materials for micro-electro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A. / editors, A. Peter Jardine [and others].
- Published
- Philadelphia, Pa. : Materials Research Society, 1992.
- Physical Description
- xi, 317 pages : illustrations ; 24 cm.
- Additional Creators
- Jardine, A. Peter
Online Version
- Series
- Contents
- Machine generated contents note: Ferroelectric Thin Films for Microelectromechanical Device Applications / W. P. Robbins / C. Ye / T. Tamagawa / D. L. Polla -- Smart Ferroelectric Films and Fibers; Applications in Micromechanics / Jiayu Chen / Ulagaraj Selvaraj / Keith G. Brooks / L. Eric Cross / K. R. Udayakumar -- Piezoelectric Properties of 0-3 Ceramic/Polar Polymer Composites / D. K. Das-Gupta / C. Dias -- Materials Development of Thin Film TiNi Ferroelastic-Ferroelectric Heterostructures / A. Peter Jardine -- Non-Linear Constitutive Properties of Piezoelectric Ceramics / H. C. Cao / A. G. Evans -- Physical, Electrical, and Piezoelectric Properties of Hot-Forged Sr[subscript 2](NbTa)[subscript 2]O[subscript 7] Ceramics / Paul A. Fuierer / Tom R. Shrout / Robert E. Newnham -- Characterization of Pulsed Laser Deposited Zinc Oxide / N. J. Ianno / L. McConville / N. Shaikh -- Impact, Friction, and Wear Testing of Microsamples of Polycrystalline Silicon / Abraham P. Lee / Albert P. Pisano / Martin G. Lim -- Stress and Microstructure in Phosphorus Doped Polycrystalline Silicon / P. Krulevitch / G. C. Johnson / R. T. Howe -- The Effect of Temperature and Pressure on Residual Stress in LPCVD Polysilicon Films / D.-G. Oei / S. L. McCarthy -- Analysis of Microfabricated Textured Multicrystalline Beams: I. Homogenization Approach / Dariush Mirfendereski / Mauro Ferrari / Armen Der Kiureghian -- Analysis of Microfabricated Textured Multicrystalline Beams: II. Probabilistic Approach / Dariush Mirfendereski / Armen Der Kiureghian / Mauro Ferrari -- Optical Energy Transfer and Photochromism in Doped Sol-Gel Glasses / Drew L'Esperance / John M. Pelo / Eric L. Chronister -- Plasma Impulse CVD Deposited TiO[subscript 2] Waveguiding Films: Properties and Potential Applications in Integrated Optical Sensor Systems / M. Heming / B. Danielzik / J. Otto / V. Paquet / Ch. Fattinger -- Sol-Gel Coatings for Electrochromic Devices / M. A. Macedo / L. H. Dall'Antonia / M. A. Aegerter -- Alignable Deposition of Thin Film Semiconductor Materials for Integrated Micro-Opto-Electronic Systems / C. Camperi-Ginestet / N. M. Jokerst / G. Augustine / M. Hargis / M. Allen -- Development of Tailored Films and Surfaces for Use in Advanced Chemical Sensors / Steve Semancik / Richard Cavicchi -- Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators / A. David Johnson / J. D. Busch / Curtis A. Ray / Charles Sloan -- A Silicon-Based Shape Memory Alloy Microvalve / Curtis A. Ray / Charles L. Sloan / A. David Johnson / John D. Busch / Bruce R. Petty -- Micron Sized Arm Using Reversible TiNi Alloy Thin Film Actuators / Katutoshi Kuribayashi / Takao Taniguchi / Masaaki Yositake / Sooichi Ogawa -- Adaptive Damping in Shape Memory TiNi During Cavitation / A. Peter Jardine -- Stressed in Situ X-Ray Diffraction Studies of a Ni-Ti Shape Memory Alloy / J. Y. Hwang / C. F. Yang -- Metallization at Microindentations / John J. Gilman -- Characterization of Thin Films Using Micromechanical Structures / R. I. Pratt / G. C. Johnson / R. T. Howe / D. J. Nikkel, Jr. -- Electronic Determination of the Modulus of Elasticity and Intrinsic Stress of Thin Films Using Capacitive Bridges / Sha Wang / Selden Crary / Khalil Najafi -- Characterization of Adhesion in Thin-Film Materials by the Blister Test / Y. Z. Chu / H. S. Jeong / R. C. White / C. J. Durning -- Determination of Eigenstresses from Curvature Data / Mauro Ferrari / Marie Weber -- Ultimate Strain Measurement of Micromachined Membranes Using a Potentiometric Technique / R. C. Goforth / R. K. Ulrich / Y. K. Leong / G. Zhao -- Theoretical Calculation for the Young's Modulus of Poly-Si and a-Si Films / Shuwen Guo / Daowen Zou / Weiyuan Wang -- Alternative Materials for Micro-Electro-Mechanical Device Construction / R. H. Hackett / L. E. Larson -- A Novel Process for Fabricating Force Sensors for Atomic Force Microscopy / M. M. Farooqui / A. G. R. Evans -- Organic Charge-Transfer Complexes for High Density Storage Using a Modified Scanning Tunneling Microscope / Shoji Yamaguchi / Carlos A. Valenzuela / Richard S. Potember -- Microheater Made of Heavily Boron Doped Single Crystal Silicon Beam / Mitsuteru Kimura / Kazuhiro Komatsuzaki -- Thin Film Heater on a Thermally Isolated Microstructure / Seajin Oh / William Chu / Sean Cahill -- Characterization of Sputtered Tungsten Silicide as a Micromechanical Material / Muh-Ling Ger / Richard B. Brown -- Mechanical and Piezoresistive Properties of Graphite-Filled Polyimide Thin Films / A. Bruno Frazier / M. R. Khan / Mark G. Allen -- LPCVD Silicon Dioxide Sacrificial Layer Etching for Surface Micromachining / David J. Monk / David S. Soane / Roger T. Howe -- Smart Building Materials Which Prevent Damage or Repair Themselves / Carolyn M. Dry.
- Subject(s)
- ISBN
- 1558991719
- Note
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note
- Includes bibliographical references and index.
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