Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A. / editors, Dale C. Jacobson [and others].
- Published:
- Pittsburgh, Pa. : Materials Research Society, [1995]
- Copyright Date:
- ©1995
- Physical Description:
- xv, 746 pages : illustrations ; 24 cm.
- Additional Creators:
- Jacobson, Dale C.
Online Version
- Series:
- Contents:
- Machine generated contents note: Depth of Origin of Secondary Ions: Suppression and Enhancement of Ions upon Passage through Overlayers / N. J. Sack / M. Akbulut / T. E. Madey -- Niobium Nitrite Thin Films Deposition Using Radical Beam Assisted Deposition / Ivan H. Murzin / Nobuyuki Hayashi / Isao Sakamoto / Matsataka Ohkubo -- Ion Mixing of Pulsed Laser Deposited Hydroxylapatite (HA) / T. L. Alford / S. W. Russell / V. B. Pizziconi / J. W. Mayer / T. E. Levine / M. Nastasi / C. M. Cotell / R. C. Y. Auyeung -- Atomic Transport by Ion Beam Mixing in the Radiation Enhanced Diffusion Region / S. M. Jung / G. S. Chang / J. H. Joo / J. J. Woo / K. S. Jang / C. N. Whang -- Implantation of Metal Ions into High Speed Steel for Improved Tribology / D. M. Ruck / J.-P. Hirvonen / S. Yan / R. Lappalainen / P. Torri -- Residual Deformations Induced by the Thermal Shock during Pulsed Ion Implantation / Jorge N. Feugeas / S. P. Bruhl / G. Sanchez / G. H. Kaufmann -- Elasticity Shear Modulus Modification by Impulsive Ion Implantation / Jorge N. Feugeas / O. A. Lambri / G. Grigioni / G. Sanchez / F. Povolo -- Microstructure Evolution during Ion Beam Assisted Deposition / Graham K. Hubler -- Equal Thickness Contours of Films Deposited on Inclined Substrates by Evaporation and Ion Beam Assisted Deposition / W. Franzen / J. D. Demaree / C. G. Fountzoulas / J. K. Hirvonen -- Uniform and Large Area Deposition of Diamond-Like Carbon Using RF Source Ion Beam / Richard L. C. Wu / William Lanter / K. Miyoshi / S. L. Heidger / P. Bletzinger / A. Garscadden -- Composition and Phase Control for Molybdenum Nitride Thin Films / Mandar S. Mudholkar / Levi T. Thompson -- In-Situ Ellipsometry Study of Ion Bombardment Effects on Low Temperature Si Epitaxy by dc Magnetron Sputtering / Y. H. Yang / G. F. Feng / M. Katiyar / J. R. Abelson -- Composition and Structure of Zirconium Nitride Films Produced by Ion Assisted Deposition / R. Valizadeh / J. S. Colligon / S. E. Donnelly / C. A. Faunce / D. Park / H. Kheyrandish -- Characterization and Performance of Carbon Films Deposited by Plasma and Ion Beam Based Techniques / K. C. Walter / H. Kung / T. Levine / J. T. Tesmer / P. Kodali / B. P. Wood / D. J. Rej / M. Nastasi / J. Koskinen / J.-P. Hirvonen -- C[subscript x]N[subscript 1-x] Thin Films Prepared by Mass Separated Ion Beam Deposition / H. C. Hofsass / C. Ronning / U. Griesmeier / M. Gross -- Negative-Ion Implantation / Junzo Ishikawa -- Etching and Charging Effects on Dose in Plasma Immersion Ion Implantation / Jiqun Shao / Shu Qin / Zhuofan Zhao / Chung Chan -- Formation of Silicon on Insulator (SOI) with Separation by Plasma Implantation of Oxygen (SPIMOX) / J. B. Liu / S. S. K. Iyer / J. Min / P. Chu / R. Gronsky / C. Hu / N. W. Cheung -- Application of MeV Ion Implantation in Semiconductor Device Manufacturing / John O. Borland -- Suppression of Ion-Induced Charge Collection by High-Energy B[superscript +]-Implanted Layer / T. Kishimoto / H. Sayama / M. Takai / Y. Ohno / K. Sonoda / T. Nishimura / A. Kinomura / Y. Horino / K. Fujii -- Erbium Doping of Silicon and Silicon Carbide Using Ion Beam Induced Epitaxial Crystallization / P. Boucaud / F.-H. Julien / J.-M. Lourtioz / H. Bernas / C. Clerc / J. Chaumont / S. Bodnar / J.-L. Regolini / X. W. Lin -- Luminescence during Tb-Ion Implantation into Sapphire / Makoto Kumagai / Masaya Iwaki -- Linear and Nonlinear Optical Properties of Metal Nanocluster-Silica Composites Formed by Sequential Implantation of Ag and Cu / R. A. Zuhr / R. H. Magruder III / T. A. Anderson / D. O. Osborne, Jr. -- Diffusion of Implanted Dopants and Isolation Species in III-V Nitrides / S. J. Pearton / C. R. Abernathy / C. B. Vartuli / R. G. Wilson / J. M. Zavada -- Low Energy Ion Irradiation Effect on Electron Transport in GaAs/AlGaAs Heterostructures / J. Yanagisawa / A. Nozawa / Y. Yuba / S. Takaoka / K. Murase / K. Gamo -- keV- and MeV-Ion Bean Synthesis of Buried SiC Layers in Silicon / J. K. N. Lindner / A. Frohnwieser / B. Rauschenbach / B. Stritzker -- Ion Beam Synthesis by Tungsten-Implantation into 6H-SiC / Hannes Weishart / J. Schoneich / H. J. Steffen / W. Matz / W. Skorupa -- Nucleation, Growth and Ostwald Ripening of CoSi, Precipitates during Co Ion Implantation in Si / S. Reiss / M. O. Ruault / J. Clayton / O. Kaitasov / K.-H. Heinig / H. Bernas -- Platinum Ion Implantation into Single Crystal Zirconia with a Carbon Sacrificial Layer on the Surface / D. X. Cao / J. W. Chu / A. P. Pogany / D. K. Sood / I. G. Brown -- Synthesis and Characterization of a Metastable (SiC)[subscript 3]N[subscript 4] Phase / C. Uslu / B. Park / D. B. Poker -- Spreading Resistance Profiling Study of GeSi/Si Structures by High Dose Ge Implantation into Si / W. Y. Cheung / S. P. Wong / I. H. Wilson / Tonghe Zhang / Paul K. Chu -- Oxidation of Silicon Implanted with High-Dose Aluminum / Zunde Yang / Honghua Du / Stephen P. Withrow -- Characterization of Si Implantation and Annealing of InP by Raman Spectroscopy / L. Artus / R. Cusco / J. M. Martin / G. Gonzalez-Diaz -- Damage and Lattice Strain in Ion-Irradiated Al[subscript x]Ga[subscript 1-x]As / P. Partyka / R. S. Averback / D. V. Forbes / J. J. Coleman / P. Ehrhart / W. Jager -- SiC[subscript x] Layers on Diamond by Si Implantation for Protection against High Temperature Oxidation / A. R. Kirkpatrick / S. Dallek / W. E. Kosik -- Ion Beam Synthesis of Silicon Carbide Infra-Red and RBS Studies / L. Simon / A. Mesli / J. J. Grob / T. Heiser / J. L. Balladore -- Atom Penetration from a Thin Film into the Substrates during Sputtering by Polyenergetic Ar[superscript +] Ion Beam with Mean Energy of 9.4 keV / B. A. Kalin / V. P. Gladkov / N. V. Volkov / S. E. Sabo -- Study of Titanium Nitrides Synthesized by High Dose Ion Implantation / M. Guemmaz / A. Mosser / D. Raiser / J. J. Grob / A. Cornet / S. Paletto -- Effect of Titanium Implantation on the Mechanical Properties of Silicon Nitride / T. Fujihana / O. Nishimura / K. Yabe / H. Hayashi / M. Iwaki -- Defect Trapping and Precipitation Processes during Annealing of Cu and Au Implanted Si / J. Wong-Leung / E. Nygren / J. S. Williams / D. J. Eaglesham -- Formation of Excess Donors during High-Dose [superscript 74]Ge[superscript +] Ion Implantation / Z. Xia / E. Ristolainen / R. Elliman / H. Ronkainen / S. Eranen / P. Kuivalainen / M. Sopanen / T. Tuomi / P. Holloway -- Coherent V[subscript 2]O[subscript 3] Precipitates in a-Al[subscript 2]O[subscript 3] Co-implanted with Vanadium and Oxygen / Laurence A. Gea / L. A. Boatner / Janet Rankin / J. D. Budai -- Anomalous Diffusion of Implanted Chlorine in Silicon / Sameer A. Datar / H. E. Gove / R. Teng / J. P. Lavine -- Effects of Implantation Temperature on the Structure, Composition and Oxidation Resistance of SiC / Zunde Yang / Honghua Du / Matthew Libera / Irwin L. Singer -- Effect of Oxygen Implantation on the Electrochemical Properties of Palladium / Takanobu Fujihana / Masato Ueshima / Katsuo Takahashi / Masaya Iwaki -- A Study of Loop Evolution during Inert Ambient Annealing and Reaction between Point Defects and Dislocation Loops during Oxidation of Silicon / J. Liu / K. S. Jones -- Defect Formation by Single Ion Impacts on Highly Oriented Pyrolytic Graphite Observed by Scanning Tunneling Microscopy / K. P. Reimann / W. Bolse / U. Geyer / G. Von Minnigerode / K. P. Lieb -- Understanding and Controlling Transient Enhanced Dopant Diffusion in Silicon / P. A. Stolk / H.-J. Gossmann / D. J. Eaglesham / D. C. Jacobson / H. S. Luftman / J. M. Poate -- Boron Enhanced Diffusion due to High Energy Ion-Implantation and its Suppression by Using RTA Process / Atsuki Ono / Hitoshi Abiko / Isami Sakai -- Defects Related to Electrical-Leakage in TMOS Structures / Lynnita Knoch / N. David Theodore / Pak Tam / Taku Yamamoto -- Thermal Stability Study of Oxygen Implanted AlGaAs/GaAs Single Quantum Well Structures Using Photoreflectance / P. J. Hughes / E. H. Li / B. L. Weiss / H. E. Jackson / J. S. Roberts -- Sputtering Induced Changes in Defect Morphology and Dopant Diffusion for Si Implanted GaAs: Influence of Ion Energy and Implant Temperature / H. G. Robinson / C. C. Lee / T. E. Haynes / E. L. Allen / M. D. Deal / K. S. Jones -- Improving Wettability of Polymethylmethacrylate by Ar[superscript +] Ion Irradiation in Oxygen Environment / Seok-Keun Koh / Won-Kook Choi / Jun-Sik Cho / Seok-Kyun Song / Hyung-Jin Jung -- A New Approach to Microporous Materials - Application of Ion Beam Technology to Polyimides Membrane / X. L. Xu / J. Y. Dolveck / G. Boiteux / M. Escoubes / M. Monchanin / J. P. Dupin / J. Davenas -- Ion Irradiated Polystyrene: Transport and Hardness Measurements / Robert H. Folk II / David E. Luzzi / Russell J. Composto / J. Bruce Rothman -- Depth-Dependent Hardness Improvements in Ion Irradiated Polystyrene / Gopal R. Rao / Laura Riester / Eal H. Lee -- Raman Spectroscopic Study of Ag-, W- and Pd-Ions Implanted Polyimide Films / Hiroshi Watanabe / Katsuo Takahashi / Masaya Iwaki -- Total Reflection X-ray Fluorescence (TXRF) / R. S. Hockett -- Trace Contamination Measurements Using Heavy Ion Backscattering Spectrometry / J. A. Knapp / J. C. Banks / D. K. Brice -- Improved Near Surface Heavy Impurity Detection by a Novel Charged Particle Energy Filter Technique / K. Ishibashi / B. K. Patnaik / N. R. Parikh / H. Tateno / J. D. Hunn -- Contamination Monitoring Using Surface Photovoltage and Application to Process Line Control / Lubek Jastrzebski / Jacek Lagowski / Worth Henley / Piotr Edelman -- Neutron Depth Profiling by Large Angle Coincidence Spectroscopy / J. Vacik / J. Cervena / V. Hnatowicz / V. Havranek / D. Fink -- Stebic Revisited / Paul D. Brown / Colin J. Humphreys -- Mass Spectrometric Studies of Pulsed Laser Ablation: Existence of Rydberg State Atoms / Robert Leuchtner -- The Characterisation of the Compositional and Electronic Profiles of Delta-Doped Layers Using Transmission Electron Microscopy / R. E. Dunin-Borkowski / W. M. Stobbs -- and Contents note continued: Observation of Semiconductor Superstructures with Backscattered Electrons in a Scanning Electron Microscopy / A. Bosacchi / S. Franchi / D. Govoni / G. Mattei / P. G. Merli / A. Migliori / M. Nacucchi -- High Resolution TEM Study of Diamond Formation on Silicon and Molybdenum Field Emitter Surfaces / A. F. Myers / J. Liu / W. B. Choi / G. J. Wojak / J. J. Hren -- Structural Differences between CVD and Thermally Grown Amorphous SiO[subscript 2] / M. Makabe / K. Hirose / H. Ishikawa / H. Ono / A. Ishitani / J. Mizuki -- Strain Measurements of SiGeC Heteroepitaxial Layers on Si(100) Using Ion Beam Analysis / S. Sego / R. J. Culbertson / P. Ye / S. Hearne / J. Xiang / N. Herbots / Z. Atzmon / A. E. Bair -- Backside SIMS Study of Ge/Pd Non-Alloyed Ohmic Contacts on InGaAs / S. A. Schwarz / C. J. Palmstrom / R. Bhat / M. Koza / L. C. Wang / M. H. Park -- Monitoring of the Early Stages of Thin Film Growth by the Generation from Second Harmonic Radiation of Supported Metal Particles / T. Gotz / W. Hoheisel / M. Buck / C. Dressler / F. Eisert / F. Trager -- Real-Time Monitoring for Laser Surface Cleaning / Y. F. Lu / M. H. Hong / Y. Aoyagi -- EXAFS Studies of the Difference in Local Structure of Various Tantalum Oxide Capacitor Films / H. Kimura / J. Mizuki / S. Kamiyama / H. Suzuki -- Quantifying the Effects of Amorphous Layers on Image Contrast Using Energy Filtered Transmission Electron Microscopy / C. B. Boothroyd / R. E. Dunin-Borkowski / W. M. Stobbs / C. J. Humphreys -- Directional Sputter Deposition for Semiconductor Applications / S. M. Rossnagel -- Structure-Property Relationship of Ion-Beam Sputtered Nd-Fe-B Magnetic Thin Films on (111) Silicon / Anthony S. Nazareth / Harsh Deep Chopra / D. K. Sood / R. B. Zmood -- Modelling of Multi-Ion-Beam Reactive Cosputtering for Metal Oxide Thin Films / D. Q. Xiao / J. G. Zhu / Z. H. Qian / W. B. Peng / L. F. Wei / Z. S. Li -- Correlation of Roughness, Impurity, Infra-Red Emissivity and Sputter Conditions for Aluminum Films / C. H. Wang / W. C. Shih / R. E. Somekh / J. E. Evetts / D. Jackson -- Ion Beam Sputter Deposition of Refractory Metal Oxides / B. E. Kempf / H. W. Dinges / A. Pocker -- Degradation in EUV Reflectance of Ion-Sputtered SiC Films / Dan Schwarcz / Ritva A. M. Keski-Kuha -- Photochemical Dynamics on Semiconductor Surfaces / X.-Y. Zhu -- Effect of Surface Roughness on Surface Photochemistry / Kari B. Myli / Vicki H. Grassian -- Chemistry and Deposition Driven by Monoenergetic Synchrotron Radiation: Initial Studies of Condensed Silanes and Water on Noble Metals / J. F. Moore / Sanjay Chaturvedi / D. R. Strongin -- UV Laser Deposition of Thin Films at 248 NM for Phase Shifting Mask Repair / Janos Farkas / Paul B. Comita / Vlad Novotny / Dolores Miller / Baurui Yeng / Martin Cohen.
- Subject(s):
- ISBN:
- 1558992553 (hardcover : alk. paper)
- Note:
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note:
- Includes bibliographical references and indexes.
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