%0 Generic %E Abeles, B. %E Chang, R. P. H. %@ 0931837030 : %T Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / %U https://ezaccess.libraries.psu.edu/login?url=http://journals.cambridge.org/mrsopl_38