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Materials Science of Microelectromechanical Systems (MEMS) Devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. / editors, Arturo A. Ayón [and others].

Conference Author
Materials Science of Microelectromechanical Systems (MEMS) Devices (4th : 2001 : Boston, Mass.)
Published
Warrendale, Pa. : Materials Research Society, [2002]
Copyright Date
©2002
Physical Description
xi, 318 pages : illustrations ; 24 cm.
Additional Creators
Ayón, Arturo A.
Online Version

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Contents
Machine generated contents note: Microsensors for Automotive Applications - Metrology and Test / Gottfried Flik / [et al.] / Carsten Raudzis / Heinz Eisenschmid -- Three-Dimensional Thermal Effects in MEMS Devices / Edward Van Keuren / [et al.] / Matthew Nelson / John Currie -- Piezoelectric Shear Mode Inkjet Actuator / [et al.] / Sergey I. Khartsev / Alex M. Grishin / Jurgen Brunahl -- Mechanisms of Fatigue in Polysilicon MEMS Structures / A. Butterwick / [et al.] / S. Allameh / P. Shrotriya -- Size Effects Determined From Tensile Tests of Perforated MEMS Scale Specimens / Ioannis Chasiotis / Wolfgang G. Knauss -- Plasticity Length Scale in LIGA Nickel MEMS Structures / P. Shrotriya / S. Allameh / [et al.] / J. Lou -- Bonding of Bulk Piezoelectric Material to Silicon Using a Gold-Tin Eutectic Bond / David C. Roberts / [et al.] / Kevin T. Turner / Richard Mlcak -- Electro-Mechanical Coupling and Power Generation in a PZT Micro-Engine / D. F. Bahr / K. R. Bruce / B. W. Olson / [et al.] -- Electrofluidic Assembly of Nanoelectromechanical Systems / Stephane Evoy / Martin Duemling / [et al.] / Ben Hailer -- Micromachined Nanoparticulate Ceramic Gas Sensor Array on MEMS Substrates / Ludwig J. Gauckler / Martin Heule -- Strength Analysis of a Micro-Rocket Combustion Chamber / Erin E. Noonan / Christopher S. Protz / [et al.] / Yoav P. Peles -- Surface Micromachined Polysilicon Components Containing Continuous Hinges and Microrivets Used to Realize Three-Dimensional MEMS Structures / Edward S. Kolesar / Matthew D. Ruff / William E. Odom / [et al.] -- Ferromagnetic MiMnGa and CoNiGa Shape Memory Alloy Films / C. Craciunescu / Y. Kishi / L. Saraf / [et al.] -- Aluminum-Silicon and Gold-Silicon Eutectics: New Opportunities for MEMS Technologies / Ciprian Iliescu / Daniel P. Poenar / Jianmin Miao -- On the Unification of Material Strength Testing for MEMS Applications / Kuo-Shen Chen -- Charge Transport in Low Stress Si-Rich Silicon Nitride Thin Films / S. Habermehl / C. Carmignani -- Fabrication of 3D Feed Horn Shape MEMS Antenna Array using MRPBI (Mirror Reflected Parallel Beam Illuminator) System With an Ultra-Slow-Rotated and Inclined X-Y-Z Stage / Jong-Yeon Park / Kun-Tae Kim / Sung Moon / [et al.] -- Indentation Delamination and Indentation Fracture in ZnO/Si Systems / Bin Huang / Ming-Hao Zhao / Tong-Yi Zhang -- Fabrication of Piezoelectric Diaphragm Using Lead Zirconate Titanate (PZT) Films / E. Hong / S. V. Krishnaswamy / C. B. Freidhoff / [et al.] -- Neutron Irradiation-Induced Dimensional Changes in MEMS Glass Substrates / Clark L. Allred / Jeffrey T. Borenstein / Linn W. Hobbs -- Issues With Gold Electroplating for Microelectromechanical System Applications / Caroline A. Kondoleon / Thomas F. Marinis -- The Fabrication of Stainless Steel Parts for MEMS / Terry J. Garino / Alfredo Morales / Thomas Buchheit / [et al.] -- Thermal Losses and Temperature Measurement in SOI MEMS Heater / Nicholas Moelders / Irina Puscasu / Mark P. McNeal / [et al.] -- Fabrication of MEMS Tonpilz Transducers / Q. F. Zhou / L.-P. Wang / G. Gerber / [et al.] -- New MEMS Technology Using Multi-Layer NILC Poly-Si and NiSi Films / W. M. Cheung / C. F. Cheng / M. C. Poon / [et al.] -- Microstructuring of Silica and Polymethylmethacrylate Glasses by Femtosecond Irradiation for MEMS Applications / Saulius Juodkazis / Kazuhiko Yamasaki / Andrius Marcinkevicius / [et al.] -- Frictional Properties of Self-Assembled Alkylsilane Chains on Silica / M. Chandross / B. Park / M. Stevens / [et al.] -- Design and Modelling of a Fourier Spectrometer Based on Sampling a Standing Wave / D. Knipp / H. Stiebig / H.-J. Buchner / [et al.] -- Microfabricated Crevice Former with A Sensor Array / Xiaoyan Wang / Robert G. Kelly / Michael L. Reed -- Process Development of Silicon-Silicon Carbide Hybrid Micro-Engine Structures / Dongwon Choi / Robert J. Shinavski / Wayne S. Steffier / [et al.] -- Tensile Test of Bulk- and Surface-Micromachined 0.1 [mu]m Thick Silicon Film Using Electrostatic Force Grip System / Toshiyuki Tsuchiya / Jiro Sakata / M. Shikida / [et al.] -- Characteristics of Thick Sol-Gel Lead Zirconate Titanate Films for Angular Rate Sensor Application / S. H. Lee / T. Iijima / K. Nakamura / [et al.] -- Mechanical Properties of Thin Film Silicon Carbide / Kamili M. Jackson / Richard L. Edwards / Guy F. Dirras / [et al.] -- Add Ceramic "MEMS" to the Pallet of MicroSystems Technologies / David L. Wilcox, Sr / Jeremy W. Burdon / Rajnish Changrani / [et al.] -- Palladium Based Micro-Membrane Hydrogen Gas Separator-Reactor in a Miniature Fuel Processor for Micro Fuel Cells / Sooraj V. Karnik / Miltiadis K. Hatalis / Mayuresh V. Kothare -- The Materials Science of "Permeable Polysilicon" Thin Films / George M. Dougherty / Timothy Sands / Albert P. Pisano -- Materials Issues in the Application of Silicon Nitride Films in Silicon MEMS / David F. Moore / Roger M. Bostock / Paul Boyle / [et al.] -- Mechanical Properties of 0.1 micron Thick SIMOX Film Measured Using On-Chip Tensile Test System / J. Amano / T. Ando / M. Shikida / [et al.] -- Silicon Microfabrication: Laser Ablation vs. Inductively Coupled Plasma (ICP) Etch / Megan M. Owens / Joseph W. Soucy / Thomas F. Marinis -- A Constitutive Model for the Mechanical Behavior of Single Crystal Silicon at Elevated Temperature / H.-S. Moon / L. Anand / S. M. Spearing -- Fracture Strength of Polysilicon Thin Films at Stress Concentrations / J. Bagdahn / W. N. Sharpe, Jr. -- Mechanical Testing of Free-Standing Thin Films / W. N. Sharpe, Jr. / K. J. Hemker -- On The Mechanism of Fatigue in Micron-Scale Structural Films of Polycrystalline Silicon / C. L. Muhlstein / E. A. Stach / R. O. Ritchie.
Subject(s)
ISBN
1558996230
Note
AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
Bibliography Note
Includes bibliographical references and indexes.
View MARC record | catkey: 14467221