Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, USA / editors, David A. LaVan [and others].
- Published:
- Warrendale, Penn. : Materials Research Society, [2003]
- Copyright Date:
- ©2003
- Physical Description:
- 298 pages : illustrations ; 24 cm.
- Additional Creators:
- LaVan, David A. and Materials Research Society. Fall Meeting (2002 : Boston, Mass.)
Online Version
- Series:
- Contents:
- Machine generated contents note: Materials Research Society Symposium Proceedings -- Mesoscale Thin Film Actuator for Promoting Fluid Motion in Microfluidic and Nanofluidic Channels / Gaurav Singh / Frederic Zenhausern / Ravi F. Saraf / Daniel J. Sadler -- Dynamic Tuning of Optical Waveguides With Electrowetting Pumps / John A. Rogers / Tom Krupenkin / Jennifer Hsieh / Peter Mach / Francesco Catteneo / Shu Yang -- Characterization of the Mechanical Properties of MEMS Devices Using Nanoscale Techniques / Nicholas X. Randall / Richard A. J. Soden -- Microreactors for Thin-Film Calorimetry / M. T. Clavaguera-Mora / A. F. Lopeandia / M. Chacon / Leonel R. Arana / K. F. Jensen / J. Rodriguez-Viejo -- Development of Fatigue Pre-Cracking Method Into Micro-Sized Specimens for Measuring Fracture Toughness / Y. Higo / K. Nakai / K. Takashima / S. Koyama -- Surface Oxide Effects on Static Fatigue of Polysilicon MEMS / H. Kahn / R. Ballarini / A. H. Heuer -- Interfacial Effects on the Premature Failure of Polycrystalline Silicon Structural Films / E. A. Stach / C. L. Muhlstein / R. O. Ritchie -- High Temperature Behavior of Polysilicon / William N. Sharpe, Jr. / Chung-Seog Oh / George Coles -- Pulsed Laser Annealing of Silicon-Germanium Films / Sherif Sedky / Jeremy Schroeder / Timothy Sands / Roger Howe / Tsu-Jae King -- Growth of Polycrystalline Silicon Carbide on Thin Polysilicon Sacrificial Layers for Surface Micromachining Applications / M. Mehregany / R. F. Wiser / C. A. Zorman / J. Chung -- Fabrication of Micro-Relief Structures in Thick Resist for Anti-Counterfeiting Applications / Patrick W. Leech / Henning Zeidler -- Selective Titanium Oxide Formation Using Electron-Beam Induced Carbon Deposition Technique / Patrik Schmuki / Thierry Djenizian / Jan Macak -- Fabrication of Flat RF MEMS Switch Membrane by Minimizing of Stress Gradients in the Au Membrane Structure / Jong-Seok Kim / Hoon Song / Jin Woo Cho / Eun Sung Lee / Sun Hee Park / Mun Chul Lee / Dong Hwa Shim / In Sang Song / Jung Woo Kim / Seok Jin Kang / Ki Moo Song -- Design and Performance of a Microengine Realized With Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators / Edward S. Kolesar / Matthew D. Ruff / William E. Odom / Joseph A. Jayachandran / Justin B. McAllister / Simon Y. Ko / Jeffery T. Howard / Peter B. Allen / Josh M. Wilken / Noah C. Boydston / Jorge E. Bosch / Richard J. Wilks -- Investigation of Polymer Micro-Actuators Based on Electrostrictive Poly(vinylidene fluoride-trifluoroethylene) Copolymers / Tian-bing Xu / Feng Xia / Z.-Y. Cheng / Q. M. Zhang -- Nonuniformity in Selective Anodization of Silicon and Its Application to Micro-Tip Fabrication / S. Uehara / N. Negishi / T. Matsubara -- Fabrication of Micromachined Piezoelectric Diaphragm Pumps Actuated by Interdigitated Transducer Electrodes / Eunki Hong / S. V. Krishnaswamy / T. T. Braggins / C. B. Freidhoff / S. Trolier-McKinstry -- Stress Adjustment and Characteristics Improvement in a 1.8GHz Range Film Bulk Acoustic Wave Resonator by Using Multi-Layer Structure of ZnO/Al[subscript 2]O[subscript 3]/SiO[subscript 2] / Masaki Takeuchi / Hajime Yamada / Hideki Kawamura / Yoshihiko Goto / Tadashi Nomura / Hiroyuki Fujino / Yukio Yoshino / Takahiro Makino / Seiichi Arai -- Hybrid Integration of III-V Optoelectronic Devices on Si Platform Using BCB / Alex Katsnelson / Vadim Tokranov / Michael Yakimov / Matthew Lamberti / Serge Oktyabrsky -- Aluminum Nitride Chip Carrier for Micro-Electro-Mechanical Sensor Applications / T. F. Marinis / J. W. Soucy -- Controlling Casimir Forces in MEMS and NEMS / R. Esquivel-Sirvent / C. Villarreal -- Tailoring of Stress Development in MEMS Packaging Systems / Satyajit S. Walwadkar / Junghyun Cho / P. W. Farrell / Lawrence E. Felton -- Defect-Induced Shifts in the Elastic Constants of Silicon / Clark L. Allred / Jeffrey T. Borenstein / Marc S. Weinberg / Xianglong Yuan / Martin Z. Bazant / Linn W. Hobbs -- Manufacturing of 3-D Microstructures Using Novel UPSAMS Process for MEMS Applications / Andre Sharon / Axel Bilsing / Gordon Lewis / Xin Zhang -- Strain Gradient Effect in Cone Indentation / Anthony A. DiCarlo / Henry T. Y. Yang / Srinivasan Chandrasekar -- Residual Stress Control to Optimize PZT MEMS Performance / M. S. Kennedy / D. F. Bahr / C. D. Richards / R. F. Richards -- Process Development and Integration of Piezoelectric Aluminum Nitride Thin-Film for RF MEMS Applications / Rajnish K. Sharma / Jiang Ning / Feng Hanhua / R. Gopalakrishnan -- Modeling of a Rotaxane-Based Molecular Device / Xiange Zheng / Karl Sohlberg -- Self-Aligned Split Gate Electrodes Fabricated on Suspended Carbon Nanotubes / S.-B. Lee / L. A. W. Robinson / K. B. K. Teo / M. Chhowalla / G. A. J. Amaratunga / W. I. Milne / D. G. Hasko / H. Ahmed -- Semi-Empirical Study of a pH-Switchable [2] Rotaxane / Laura Frankfort / Karl Sohlberg -- Focused Ion Beam Nano-Machined Structures for Strain Analysis by a Moire Technique / Biao Li / Huimin Xie / Xin Zhang -- Alignment and Deposition of Single Wall Carbon Nanotubes Under the Influence of an Electric Field / Paul Jaynes / Thomas Tiano / Margaret Roylance / Charles Carey / Kenneth McElrath -- Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications / H. D. Espinosa / B. Peng / K.-H. Kim / B. C. Prorok / N. Moldovan / X. C. Xiao / J. E. Gerbi / J. Birrell / O. Auciello / J. A. Carlisle / D. M. Gruen / D. C. Mancini -- Microscale Measurement of Stresses in a Silicon Flexure Using Raman Spectroscopy / V. T. Srikar / A. K. Swan / B. B. Goldberg / M. S. Unlu / S. M. Spearing -- The Development of Alternative Molds for Micromolding / Terry Garino / Joseph Cesarano / Alfredo Morales -- The Improvement of Temperature Coefficient of Frequency in Thin Film Bulk Acoustic Wave Resonator Using Secondary Harmonics / Yukio Yoshino / Masaki Takeuchi / Hajime Yamada / Yoshihiko Goto / Tadashi Nomura / Takahiro Makino / Seiichi Arai -- Micromolding of Pb and Zn With Surface Engineered LiGA Mold Inserts / D. M. Cao / D. J. Guidry / W. J. Meng / K. W. Kelly -- A Chemical Sensor Using Neurons and a 3-D Micro-Fluidic Chip / H. McNally / H. Kufluoglu / D. Akin / J. Grimmer / J. Walker / R. Shi / R. Borgens / R. Bashir -- Vibrating RF MEMS for Low Power Communications / Clark T.-C. Nguyen -- Modeling Combined Thermal, Electrical, Optical and Mechanical Response for MEMS Spectroscopic Gas Sensor Based on Photonic Crystals / Anton C. Greenwald / Martin U. Pralle / Mark P. McNeal / Nicholas Moelders / Irina Puscasu / James T. Daly / Edward A. Johnson -- Piezoelectric Micromachined Ultrasonic Transducers Based on PZT Films / Jacek Baborowski / Nicolas Ledermann / Paul Muralt -- A Comparative Microtribological Investigation of Diamond-Like Carbon Films for Applications in Microsystems / S. Imad-Uddin Ahmed / Giuseppe Bregliozzi / Henry Haefke -- Planar Extrinsic Biasing of Thin Film Shape-Memory MEMS Actuators / D. S. Grummon / R. Gotthardt / T. LaGrange.
- Subject(s):
- ISBN:
- 1558996788
- Note:
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note:
- Includes bibliographical references and index.
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