Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler [electronic resource].
- Berkeley, Calif. : Lawrence Berkeley National Laboratory. Advanced Light Source, 2009.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 23 : digital, PDF file
- Additional Creators:
- Lawrence Berkeley National Laboratory
Lawrence Berkeley National Laboratory. Advanced Light Source
United States. Department of Energy. Office of Scientific and Technical Information
- A new low budget slope measuring instrument, the Developmental Long Trace Profiler (DLTP), was recently brought to operation at the ALS Optical Metrology Laboratory. The design, instrumental control and data acquisition system, initial alignment and calibration procedures, as well as the developed experimental precautions and procedures are described in detail. The capability of the DLTP to achieve sub-microradian surface slope metrology is verified via cross-comparison measurements with other high performance slope measuring instruments when measuring the same high quality test optics. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed.
- Published through SciTech Connect.
INTERNATIONAL WORKSHOP ON X-RAY MIRROR DESIGN, FABRICATION, AND METROLOGY, Osaka, Japan, September 22-24, 2009.
Smith, Brian V; Yashchuk, Valeriy V; Domning, Edward E.; Morrison, Gregory Y.; Siewert, Frank; Zeschke, Thomas; Kirschman, Jonathan L.; Geckeler, Ralf; Barber, Samuel; Just, Andreas.
- Funding Information:
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