ECR plasma cleaning [electronic resource] : an in-situ processing technique for RF cavities
- Washington, D.C. : United States. Dept. of Energy, 2008. and Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 10 pages : digital, PDF file
- Additional Creators:
- Fermi National Accelerator Laboratory, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- A condition for Electron Cyclotron Resonance (ECR) can be established inside a fully assembled RF cavity without the need for removing high-power couplers. As such, plasma generated by this process can be used as a final cleaning step, or as an alternative cleaning step in place of other techniques. Tests showed filtered dry air plasma can successfully remove sulfur particles on niobium surface while the surface oxygen content remains intact.
- Published through SciTech Connect., 01/01/2008., "fermilab-pub-08-005-td", FT, and Edwards, H.; Romanenko, A.; Khabiboulline, T.; Wu, G.; Jiang, H.; Antoine, C.; Koeth, T.; Cooley, L.; Moeller, W-D.; Pechenezhskiy, I.; Terechkine, Y.
- Funding Information:
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