Formation of pre-sheath boundary layers in electronegative plasmas [electronic resource].
- Washington, D.C. : United States. Dept. of Energy, 1998.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 9 pages : digital, PDF file
- Additional Creators:
- Lawrence Livermore National Laboratory
United States. Department of Energy
United States. Department of Energy. Office of Scientific and Technical Information
- In electronegative plasmas Coulomb scattering between positive and negative ions can lead to the formation of a pre-sheath boundary layer containing the bulk of the negative ions. The negative ion boundary layer forms when momentum transfer from positive to negative ions dominates the negative ion acceleration from the electric field. This condition is met in Inductively Coupled Plasma reactors that operate at low pressure and high plasma density. Simulations of the GEC reactor for Chlorine and Oxygen chemistries using the INDUCT95 2D model are presented showing the pre-sheath boundary layer structure as a function of applied power and neutral pressure.
- Published through SciTech Connect.
4. international workshop on advanced plasma tools process engineering, Millbrae, CA (United States), 26-27 May 1998.
Vitello, P., LLNL.
- Funding Information:
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