Actions for Nitrogen Atom Energy Distributions in a Hollow-cathode Planar Sputtering Magnetron [electronic resource].

Email RIS file
Bookmark
Report an Issue

Nitrogen Atom Energy Distributions in a Hollow-cathode Planar Sputtering Magnetron [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy. Office of Energy Research, 1999.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
404 Kilobytes : digital, PDF file
Additional Creators
Princeton University. Plasma Physics Laboratory, United States. Department of Energy. Office of Energy Research, and United States. Department of Energy. Office of Scientific and Technical Information
Access Online

Availability

I Want It
I Want It

Finding items...

Restrictions on Access
Free-to-read Unrestricted online access
Summary
Energy distributions of N atoms in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 Å, well-separated from molecular nitrogen emission bands, was identified. Jansson's nonlinear spectral deconvolution method, refined by minimization of χw ² , was used to obtain the optimal deconvolved spectra. These showed nitrogen atom energies from 1 eV to beyond 500 eV. Based on comparisons with VFTRIM results, we propose that the energetic N atoms are generated from N2+ ions after these ions are accelerated through the sheath and dissociatively reflect from the cathode.
Report Numbers
E 1.99:pppl-3347
pppl-3347
Subject(s)
Other Subject(s)
Note
Published through SciTech Connect.
06/01/1999.
"pppl-3347"
"DE00008184"
Samuel A. Cohen; Zhehui Wang; D.N. Ruzic; M.J. Goeckner.
Type of Report and Period Covered Note
Topical;
Funding Information
AC02-76CH03073
View MARC record | catkey: 14741298