Nitrogen Atom Energy Distributions in a Hollow-cathode Planar Sputtering Magnetron [electronic resource].
- Washington, D.C. : United States. Dept. of Energy. Office of Energy Research, 1999.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
- Physical Description:
- 404 Kilobytes : digital, PDF file
- Additional Creators:
- Princeton University. Plasma Physics Laboratory, United States. Department of Energy. Office of Energy Research, and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- Energy distributions of N atoms in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 Å, well-separated from molecular nitrogen emission bands, was identified. Jansson's nonlinear spectral deconvolution method, refined by minimization of χw ² , was used to obtain the optimal deconvolved spectra. These showed nitrogen atom energies from 1 eV to beyond 500 eV. Based on comparisons with VFTRIM results, we propose that the energetic N atoms are generated from N2+ ions after these ions are accelerated through the sheath and dissociatively reflect from the cathode.
- Report Numbers:
- E 1.99:pppl-3347
- Other Subject(s):
- Published through SciTech Connect.
Samuel A. Cohen; Zhehui Wang; D.N. Ruzic; M.J. Goeckner.
- Type of Report and Period Covered Note:
- Funding Information:
View MARC record | catkey: 14741298