Nitrogen Atom Energy Distributions in a Hollow-cathode Planar Sputtering Magnetron [electronic resource].

Published:: Washington, D.C. : United States. Dept. of Energy. Office of Energy Research, 1999.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description:: 404 Kilobytes : digital, PDF file
Additional Creators:: Princeton University. Plasma Physics Laboratory, United States. Department of Energy. Office of Energy Research, and United States. Department of Energy. Office of Scientific and Technical Information

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Summary:

Energy distributions of N atoms in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 Å, well-separated from molecular nitrogen emission bands, was identified. Jansson's nonlinear spectral deconvolution method, refined by minimization of χ_w ² , was used to obtain the optimal deconvolved spectra. These showed nitrogen atom energies from 1 eV to beyond 500 eV. Based on comparisons with VFTRIM results, we propose that the energetic N atoms are generated from N₂⁺ ions after these ions are accelerated through the sheath and dissociatively reflect from the cathode.

Report Numbers:

E 1.99:pppl-3347
pppl-3347

Subject(s):

Plasma Physics And Fusion

Other Subject(s):

Note:

Published through SciTech Connect.
06/01/1999.
"pppl-3347"
"DE00008184"
Samuel A. Cohen; Zhehui Wang; D.N. Ruzic; M.J. Goeckner.

Type of Report and Period Covered Note:

Topical;

Funding Information:

AC02-76CH03073

View MARC record | catkey: 14741298