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Depth profiling of oxidized a-C [electronic resource] : D Layers on Be -- A comparison of {sup 4}He RBS and {sup 28}Si ERD analysis

Published
Washington, D.C. : United States. Dept. of Energy, 1997.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
18 pages : digital, PDF file
Additional Creators
Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
In applications dealing with the deposition of amorphous hydrogenated carbon layers or in the determination of the composition of deposited layers on the walls of nuclear fusion plasma experiments, the analysis of mixtures of light elements on heavy substrates is necessary. Depth profiling by means of RBS is often difficult due to the overlap of the backscattering intensities of different constituents from different depths. The erosion and reaction of deposited amorphous deuterated carbon (a-C:D) films with a Be substrate due to annealing in air poses an analytical challenge especially if simultaneously the exchange of hydrogen isotopes should be monitored. The analysis of the different recoiling atoms from collisions with heavy ions in Elastic Recoil Detection (ERD) can provide a tool which resolves all constituents in a single analysis. In the present study the composition of intermixed layers on Be containing H, D, Be, C and O has been analyzed using conventional ⁴He RBS at 2.2 MeV together with 2.5 MeV ⁴He ERD for hydrogen isotope analysis. At these energies, an overlap of signals from different constituents could be avoided in most cases. As alternative method heavy ion ERD using Si{sup 7+} ions extracted from a 5 MeV Tandem Van de Graff accelerator was investigated. At a scattering angle of 30° Si ions could not be scattered into the detector and a solid state detector without protecting foil could be used. Even in the intermixed layers at terminal energies of 5 MeV the heavy constituents could be separated while signals from recoiling hydrogen and deuterium atoms could be resolved on top of the signal from the Be substrate. For the analysis of the RBS and ERD data the newly developed spectra simulation program SIMNRA has been used which includes a large data bank for scattering and nuclear reaction cross sections. The depth profiles of all constituents extracted from the simulation are compared for both methods.
Report Numbers
E 1.99:sand--97-2141c
E 1.99: conf-970785--
conf-970785--
sand--97-2141c
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Other Subject(s)
Note
Published through SciTech Connect.
06/01/1997.
"sand--97-2141c"
" conf-970785--"
"DE98000182"
13. international conference on ion beam analysis (IBA-13), Lisbon (Portugal), 27 Jul - 1 Aug 1997.
Roth, J.; Wampler, W.R.; Mayer, M.; Walsh, D.
Funding Information
AC04-94AL85000
View MARC record | catkey: 14743362