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Low-loss LIGA-micromachined conductor-backed coplanar waveguide [electronic resource].

Published:
Washington, D.C. : United States. Dept. of Energy, 2004.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description:
16 pages : digital, PDF file
Additional Creators:
Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary:
A mesoscale low-loss LIGA-micromachined conductor-backed coplanar waveguide is presented. The 517 {micro}m lines are the tallest uniplanar LIGA-fabricated microwave transmission lines to date, as well as the first to be constructed of copper rather than nickel. The conductor-backed micromachined CPW on quartz achieves a measured attenuation of 0.064 dB/cm at 15.5 GHz.
Report Numbers:
E 1.99:sand2004-5621
sand2004-5621
Subject(s):
Other Subject(s):
Note:
Published through SciTech Connect.
12/01/2004.
"sand2004-5621"
Forman, Michael A.
Funding Information:
AC04-94AL85000
View MARC record | catkey: 14757294