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Investigation of the hydrogenation of SiCl/sub 4/. Final report, March 31, 1979-April 1, 1981 [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 1981.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy.
Physical Description
Pages: 122 : digital, PDF file
Additional Creators
Massachusetts Institute of Technology, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
A two-year research and development program was initiated in April of 1979 to study the hydrochlorination of silicon tetrachloride and metallurgical grade (m.g.) silicon metal to trichlorosilane, 3 SiCl/sub 4/ + 2H/sub 2/ + Si in equilibrium 4 SiHCl/sub 3/. A laboratory scale pressure reactor was constructed to study this reaction at pressures up to 500 psig. Reaction kinetic measurements were carried out as a function of reactor pressure, reaction temperature and H/sub 2//SiCl/sub 4/ feed ratio. Based on the reaction kinetic data, the hydrochlorination of SiCl/sub 4/ and m.g. silicon metal is found to be an efficient process to produce SiHCl/sub 3/ in good conversions and in high yields. Copper is an effective catalyst. Results of a corrosion study show that conventional nickel-chromium alloys are suitable material of construction for the hydrochlorination reactor. The hydrochlorination reaction is relatively insensitive to external process parameters such as silicon particle size distribution and the impurities in the m.g. silicon metal.
Report Numbers
E 1.99:doe/jpl/955382-79/8
doe/jpl/955382-79/8
Subject(s)
Other Subject(s)
Note
Published through SciTech Connect.
04/15/1981.
"doe/jpl/955382-79/8"
"DE81025543"
Seyferth, D.; Mui, J. Y.P.
Funding Information
NAS-7-100-955382
View MARC record | catkey: 14799789