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Optical/thermal analysis methodology for a space-qualifiable RTP furnace

Author
Dardarian, S.
Published
JAN 1, 1993.
Physical Description
1 electronic document
Additional Creators
Cole, E. and Bugby, D.
Online Version

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Restrictions on Access
Unclassified, Unlimited, Publicly available.
Free-to-read Unrestricted online access
Summary
A methodology to predict the coupled optical/thermal performance of a reflective cavity heating system was developed and a laboratory test to verify the method was carried out. The procedure was utilized to design a rapid thermal processing (RTP) furnace for the Robot-Operated Material Processing in Space (ROMPS) Program which is a planned STS HH-G canister experiment involving robotics and material processing in microgravity. The laboratory test employed a tungsten-halogen reflector/lamp to heat thin, p-type silicon wafers. Measurements instrumentation consisted of 5-mil Pt/Pt-Rh thermocouples and an optical pyrometer. The predicted results, utilizing an optical ray-tracing program and a lumped-capacitance thermal analyzer, showed good agreement with the measured data for temperatures exceeding 1300 C.
Other Subject(s)
Collection
NASA Technical Reports Server (NTRS) Collection.
Note
Document ID: 19930010700.
Accession ID: 93N19889.
NASA-CR-192254.
NAS 1.26:192254.
Terms of Use and Reproduction
No Copyright.
View MARC record | catkey: 15671894