%0 Generic %A Bhattacharya, P. K., %E Yao, H. D., %E Alterovitz, S. A., %E Pamulapati, J., %E Sieg, R. M., %E Woollam, J. A., %E Snyder, P. G., %E Sekula-Moise, P. A., %T Study of InGaAs based MODFET structures using variable angle spectroscopic ellipsometry. %U http://hdl.handle.net/2060/19910010622