Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California / James A. Bondur [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Published:: Bellingham, Wash., USA : SPIE, [1994]
Copyright Date:: ©1994
Physical Description:: viii, 462 pages : illustrations ; 28 cm.
Additional Creators:: Bondur, James and Society of Photo-optical Instrumentation Engineers

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ISBN:

0819413625 (pbk.)

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Includes bibliographical references and author index.

View MARC record | catkey: 1590123