Actions for Synchrotron X-ray Microdiffraction Analysis of Proton Irradiated Polycrystalline Diamond Films

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Synchrotron X-ray Microdiffraction Analysis of Proton Irradiated Polycrystalline Diamond Films

Author
Liu, W.
Published
July 26, 2004.
Physical Description
1 electronic document
Additional Creators
Newton, R. I., Ice, G. E., and Davidson, J. L.
Online Version

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Summary
X-ray microdiffraction is a non-destructive technique that allows for depth-resolved, strain measurements with sub-micron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechanical Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2x10(exp 17) H(+)per square centimeter protons. Preliminary results indicate that a measurable strain, on the order of 10(exp -3), was introduced into the film near the End of Range (EOR) region of the protons.
Other Subject(s)
Collection
NASA Technical Reports Server (NTRS) Collection.
Note
Document ID: 20040121079.
Terms of Use and Reproduction
Copyright, Distribution as joint owner in the copyright.
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